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Polymer NIL Stamps

 
    

Polymer stamps can be fabricated with any design specified by customers. NILT also offers to make polymer stamps from customers' existing silicon or fused silica stamps. The master mold for polymer stamps is patterned by electron beam lithography or UV lithography. The polymer stamps are typically delivered in round wafers shapes.
 
NILT delivers polymer stamps for many different applications such as: sensing devices, wire grid polarizers, hydrophobic films.
 
Specifications:
Stamp material
COC, COP
Stamp sizes
Up to 6 inch round
Stamp thickness
200 µm — 1 mm
Minimum lateral dimension 100 nm
Aspect ratio Up to 1:3 (pattern dependent)
Design Customer specified
Design file format
gds, dxf, tdb
Anti-sticking
FDTS (optional, material dependent)
Delivery time Typically 4 weeks
Examples
Polymer stamps

Different examples of patterns and feature
Related information
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