Polymer NIL Stamps

 

Polymer stamps can be fabricated with any design specified by customers. NILT also offers to make polymer stamps from customers' existing silicon or fused silica stamps. The master mold for polymer stamps is patterned by electron beam lithography or UV lithography. The polymer stamps are typically delivered in round wafers shapes.

 

NILT delivers polymer stamps for many different applications such as: sensing devices, wire grid polarizers, hydrophobic films.

Stamp material COC, COP Stamp sizes Up to 6 inch round Stamp thickness 200 µm – 1 mm Minimum lateral dimension 100 nm Aspect ratio Up to 1:3 (pattern dependent) Design Customer specified Design file format gds, dxf, tdb Anti-sticking FDTS (optional, material dependent) Delivery time Typically 4 weeks

 

 

 

Polymer stamps Different examples of patterns and feature

 

PDMS NIL Stamps Silicon NIL Stamps Fused Silica NIL Stamps NIL Service EBL Service Anti-Reflective Standard Stamp Processing UV NIL Tool

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