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PDMS stamps are fabricated with any design specified by customers. NILT also offers to make PDMS stamps from customers’ existing silicon or fused silica stamps. When NILT makes PDMS stamps, the pattern is defined by electron beam lithography, nanoimprint lithography (NIL) or UV lithography. The PDMS stamps are typically delivered in round wafers shapes.
Specifications:
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Stamp material |
PDMS |
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Stamp sizes (wafer) |
Up to 6 inch round |
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Stamp thickness |
1 mm (other upon request) |
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Minimum lateral dimension |
20 nm |
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Aspect ratio |
Up to 1:3 (pattern dependent) |
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Design |
Customer specified |
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Design file format |
gds, dxf, tdb |
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Anti-sticking |
FDTS (optional) |
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Delivery time |
Typically 4 weeks |
Examples
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Polymer Stamps
Various examples |
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Related information
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