EZI – UV NIL Tool​

EZImprinting is a super-high yield (> 99 %) nanoimprint lithography platform with sub-10 nm resolution and one-step Auto Release™ function.

Advantages of the PL400/600 Nanoimprint Systems:
  • Full-wafer imprinting – 6 inch PL600, 4 inch PL400
  • Sub-10 nm resolution with 99% yield
  • One step auto-release function preventing mold/substrate damage
  • Supports both hard and soft molds of various types
  • Variable mold and substrate sizes
  • Programmable PLC with touch-screen user interface
  • Alignment options

For more details, download the brochure: