Anti-Sticking Coating

NIL Technology offers anti-sticking coating by FDTS or any suitable substrate not larger than 8 inch round. The coating is performed by vapor phase deposition and the substrate is treated with standard processes as oxygen plasma, prior to the FDTS deposition. The oxygen plasma treatment can be circumvented if required. 

General specifications for our Anti-Sticking Coating

Maximum substrate size

Substrate materials

Contact angle with water

FDTS chemical name

FDTS chemical formula


8 inch round

Silicon, Fused Silica, Nickel (adhesion layer of 3-4 nm Al2O3 is used on Ni), polymers

Larger than 105 deg

1H, 1H, 2H, 2H-perflourodecyltrichlorosilane



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