NIL Technology offers anti-sticking coating by FDTS or any suitable substrate not larger than 8 inch round. The coating is performed by vapor phase deposition and the substrate is treated with standard processes as oxygen plasma, prior to the FDTS deposition. The oxygen plasma treatment can be circumvented if required.
General specifications for our Anti-Sticking Coating
Maximum substrate size
Contact angle with water
FDTS chemical name
FDTS chemical formula
FDTS CAS no.
8 inch round
Silicon, Fused Silica, Nickel (adhesion layer of 3-4 nm Al2O3 is used on Ni), polymers
Larger than 105 deg
1H, 1H, 2H, 2H-perflourodecyltrichlorosilane