Get your CNI

The CNI can be configured in 20 different versions. It all depends on your needs.

On this page, you can find the configuration that is right for you. You can then request a quote for the selected option and we will get back to you about the selection. When you make your choice between chamber size and imprint options, you can see the selected configurations on a 3D image. You can also compare the selection with other choices by clicking around in the options.

When you have made your final choice, please fill out personal information, so we can get back to you and  press “Request Quote”. 

Get your CNI | NIL Technology

Options of the CNI

1. Select chamber size

The CNI tool is available in two different chamber sizes; 120 and 210 mm diameter. 

The former is suitable for imprinting on wafers up to 4” in size and the latter is suitable for imprinting on wafers up to 8” in size. 

Both chambers can handle all stamp and sample sizes, as long as they fit within the chamber diameter.

2. Select UV imprint option

The CNI tool performs UV nanoimprint at 365 nm and/or 405 nm. 
 
The UV source is built into the lid of the CNI tool and the UV exposure happens through the membrane.  You have the options between the following:
 
  • No UV source
  • 365 nm UV source
  • 405 nm UV source
  • 365 nm and 405 nm UV source

3. Select thermal imprint option

The CNI performs thermal nanoimprint and combined thermal and UV nanoimprint.

The CNI lids with built-in UV source also works for thermal imprint with temperatures up to 200°C. You can order a high temperature lid that allows thermal imprint up to 250°C. If you choose to get no UV source, you will automatically get the high temperature lid. The options:  

  • No thermal imprint option
  • Thermal imprint up to 200°C
  • Thermal imprint up to 250°C

Choose the size of the CNI - 120 mm or 210 mm

1. Choose size - 120 mm

Now, choose between UV and thermal imprint options. Both fields are required to make a choice between the many different configurations. 

Nano Imprint Tool 120 mm Chamber

1. Choose size - 210 mm

Now, choose between UV  and thermal imprint options. Both fields are required to make a choice between the many different configurations. 

Nano Imprint Tool 210 mm Chamber

Would you like to know more?

Sign up for our CNI webinar

NILT Compact Nanoimprint Tool – Options and Applications

The CNI is a very flexible tool. It can be used in a variety of ways. In this webinar, we will demonstrate the tool in action. We will show you the many options and how you can configure the CNI to fit exactly your needs.

The key is to understand the flexibility and power the CNI has. In the webinar, we will explain which options you need for each type of processing and how they work in the tool. Finally, we will show a few examples of CNI processing.

Date & time:  sometime after summer
Duration: 45 minutes

Get your CNI | NIL Technology

Kristian Smistrup
Senior Tool Development Engineer

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