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Micro Test Standard Stamp

The stamp consists of 9 identically patterned areas arranged in a 3 x 3 array. The structures on the stamp are line gratings with line widths of 3, 5, 10 and 20 µm with line/spacing ratios of 1:1, 1:2 and 1:3.The dimensions and ratios makes it straight forward to do inspection after imprint using conventional microscopy and stylus profilometry.

Stamp size 100 mm diameter with a flat (SEMI standard wafer)
Stamp material Silicon
Stamp thickness 525 µm
Structure size 3, 5, 10, 20 µm
Structure shape Line gratings
Polarity Protrusions
Structure height 300 nm
Delivery time 2-3 weeks
Anti-sticking layer and dicing are optional. Furthermore, the stamp can be made in thin polymer films upon customer request.

Micro Test Standard Stamp

Design specifications
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