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65-Stamps / Templates

 
    
 
65-stamps are made in fused silica / quartz from 6025 mask blanks. The size is 65 mm x 65 mm x 6.35 mm and the patterned area is in the center on a 15 µm high mesa. The stamps can be made with any design specified by customers and are patterned using electron beam lithography. The area around the mesa can either be transparent or non-transparent, e.g. covered with chromium.
 
NILT delivers 65-stamps for different applications such as: SAW devices, meta materials and optical resonators.


Specifications:
Stamp material
Fused silica (Quartz)
Stamp size
65 mm x 65 mm
Stamp thickness
6.35 mm (0.25 inch)
Mesa size
Up to 25 mm x 25 mm
Mesa height 15 µm (other heights are possible upon request)
Minimum lateral dimension 20 nm
Aspect ratio Up to 1:5 (pattern dependent)
Design Customer specified
Design file format
gds, dxf, tdb
Anti-sticking
FDTS (optional)
Delivery time 8-10 weeks

 
Examples
65-stamps

Different examples of patterns and features
Related information
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