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PDMS NIL Stamps

 
    
 
PDMS stamps are fabricated with any design specified by customers. NILT also offers to make PDMS stamps from customers’ existing silicon or fused silica stamps. When NILT makes PDMS stamps, the pattern is defined by electron beam lithography, nanoimprint lithography (NIL) or UV lithography. The PDMS stamps are typically delivered in round wafers shapes.
 
Specifications:
 
Stamp material
PDMS
Stamp sizes (wafer)
Up to 6 inch round
Stamp thickness
1 mm (other upon request)
Minimum lateral dimension
20 nm
Aspect ratio
Up to 1:3 (pattern dependent)
Design
Customer specified
Design file format
gds, dxf, tdb
Anti-sticking
FDTS (optional)
Delivery time
Typically 4 weeks
 
 
 
Examples
Polymer Stamps
 
Various examples
Related information
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