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Cleanroom Processing

NILT offers a wide range of processing services, often in combination with NILT core competences, electron beam lithography and nanoimprint lithography, but also independently. All standard silicon processes are offered:
  • UV photolithography (365 nm UV contact aligner)
  • Material deposition (sputtering, thermal, electron beam, LPCVD, PECVD, spin coating)
  • Etching (RIE, ICP, wet)
  • Thermal oxidation
  • Characterization (SEM, AFM, profilometer, ellipsometer, reflectometer, optical microscopes)
If you have any needs for processing services please contact us
Different examples of patterns and features
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