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Wire Grid Polarizer

The Wire Grid Polarizer (WGP) standard stamp portfolio is ideal for development of WGP processes. The WGP standard stamps are made in silicon and come in a chip size format. NILT deliver masters/stamps made from 300 mm diameter wafers. Contact NILT for further information.
  • Wire grid polarizer standard stamp
  • 50 nm or 70 nm half pitch line grating
  • Line grating  quality are guaranteed in active area
Specifications
  
Type A Type B
Stamp ID WGPSS_ 50hp WGPSS_ 70hp
Material Silicon Silicon
Linewidth 50 nm +/- 5% 70 nm +/- 5%
Pitch 100 nm +/- 5% 140 nm +/- 5%
Profile height/depth 130 nm +/- 10% 150 nm +/- 10%
Stamp size 48 mm x 52 mm 48 mm x 52 mm
Stamp thickness 775 µm +/- 25 µm 775 µm +/- 25 µm
Pattern location Fully patterned Fully patterned
Active area (center of stamp) 45 mm x 45 mm 45 mm x 45 mm
  
Examples
WGP Standard Stamp
Examples of pattern and features
Related information
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