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References

 



Rodolphe, Marie, Marie Pødenphant, Kamila Koprowska, Loic Bærlocher, Roland C.M. Vulders, Jennifer Wilding, Niel Ashley, Simon J. mcGowan, Dianne van Strijp, Freek van Hemert, Tom Olesen, Niels Agernsnap, Brian Bilenberg, Celine Sabatel, Julien Schira, Anders Kristensen, Walter Bodner, Pieter J. van Zaag and Kalim U. Mir


Biomechanical cell regulation by high aspect ratio nanoimprinted pillars
Felipe Viela et al.
Advanced Functional Materials - Volume 26, Issue 31 (2016)

Plasmonic colors: Toward mass production of metasurfaces
Emil Højlund-Nielsen et al.
Advanced Materials Technologies, 1600054 (2016)

Demonstration of a positron beam-driven hollow channel plasma wakefield accelerator
Spencer Gessner et al.
Nature Communications 7, Article number: 11785 (2016)

Fast characterization of moving samples with nano-textured surfaces
Morten Hannibal Madsen et al.
Optica, Vol. 2, Issue 4, pp. 301-306 (2015)

Designing visual appearance using a structured surface
Villads Egede Johansen et al.
Optica, Vol. 2, Issue 3, pp. 239-245 (2015)

Residual layer-free Reverse Nanoimprint Lithography on silicon and metal-coated substrates
A. Fernándeza et al.
Microelectronic Engineering, Micro/Nano Fabrication 2014, Volume 141, 15 June 2015, Pages 56–61

Angle-independent structural colors of silicon
E. Højlund-Nielsen et al.
J. Nanophoton. 8(1), 083988 (May 13, 2014). doi:10.1117/1.JNP.8.083988

Process variations in surface nano geometries manufacture on large area substrates
M. Calaon et al.
Proceedings of the 14th euspe International Conference – Dubrovnik – June 2014

Nanostructuring steel for injection molding tools
A. Al-Azawi, K. Smistrup and A. Kristensen
Journal of Micromechanics and Microengineering Volume 24 Number 5

Nanoimprinted DWDM laser arrays on indium phosphide substrates
K. Smistrup et al.
Microelectronic Engineering - DOI: 10.1016/j.mee

Injection molded pinched flow fractionation device for enrichment of somatic cells in cow milk
M. Pødenphanta et al.
Microelectronic Engineering 124 (2014) 53–57

Study of moiré grating fabrication on metal samples using nanoimprint lithography
M. Tang, H. Xie, J. Zhu, X. Li, and Yanjie Li
Optics Express, Vol. 20, Issue 3, pp. 2942-2955 (2012)

Bioinspired ultrahigh water pinning nanostructures
J. B. Law, A. Hua Ng, A. Y. He and H. Y. Low
Langmuir, 2014, 30 (1), pp 325–331

Single layer broadband anti-reflective coatings for plastic substrates produced by full wafer and roll-to-roll step-and-flash nano-imprint lithography
Marieke Burghoorn et al.
Materials 2013, 6(9), 3710-3726

Applications of nanometrology in polymer production
J. Garnaes et al.
International Congress on Metrology, Paris, October 2013

Well-defined microapertures for ion channel biosensors
E. Halža, T. H. Bro, B. Bilenberg, and A. Koçer
Analytical Chemestry. 2013, 85, 811 ˆ’815

DWDM laser arrays fabricated using thermal nanoimprint lithography on indium phosphide substrates
K. Smistrup, J. Nørregaard, A. Mironov, T. H. Bro, B. Bilenberg, O. Hansen, F. Khan, M. Emanuel, Y. Ma, Y. Zhang, A. Kristensen, S. Rishton
The 57th annual conference on electron, ion, and photon beam technology and nanofacrication, EIPBN 2013

Simulation and experimental study of the effects of process factors on the uniformity of the residual layer thickness in hot embossing
F. Omar, A. Kolew, E. B. Brousseau, H. Hirshy
Journal of Micro- and Nano-Manufacturing, 2013 by ASME, Vol. 1 / 021002-1

Modeling the constitutive and frictional behavior of PTFE flexible stamps for NIL
M.R. Sonne, J.H. Hattel
Microelectronic Engineering 106 (2013) 1—8

Replication of large area nanoimprint stamp with small critical dimension loss
M. FanTao, G. Le, W. ZhiWen, H. ZhiTao, C. JinKui
Science China - Technological Sciences March 2012 Vol.55 No.3: 600—605

Microfluidic chip designs process optimization and dimensional quality control
M. Calaon, H. N. Hansen, G. Tosello, J. Garnaes, J. Nørregaard, W. Li
Journal Of Microsystem Technology - Heidelberg, December 3-5, 2012

Printing colour at the optical diffraction limit
K. Kumar, H. Duan, R. Hegde, S. Koh, J. Wei, and J. Yang
Nature Nanotechnology (2012). doi:10.1038/nnano.2012.128

Production quality control of microfluidic designs
M. Calaon, H. N. Hansen, G. Tosello1, J. Garnaes, J. Nørregaard, M. Guttmann
Microfluidics 2012 - Heidelberg

A nanoporous silicon nitride membrane using a two-step lift-off pattern transfer with thermal nanoimprint lithography
Bhargav P Nabar, Zeynep Celik-Butler, Brian H Dennis and Richard E Billol
2012 J. Micromech. Microeng. 22 045012

Optical properties of gold and aluminium nanoparticles for silicon solar cell applications
T. L. Templea and D. M. Bagnall
Journal of Applied Physics 109, 084343, 2011

Profiles of complex periodic structures determined by scatterometry
P-E. Hansen, B. Bilenberg, Y. R. Shen and M. Karamehmedovic.
Proceedings of the 13th International Confeence on Metrology and Properties of Engineering Surfaces, Twickenham Stadium, UK, April 2011

Vertical sidewall roughness measured by AFM and SEM
Jørgen Garnæs, Brian Bilenberg, Radu Malureanu, Jacob Markussen
Proceedings Nanoscale 2010

Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding
R. Brucka, R. Hainbergera, R. Heera, N. Kataevaa, A. Köcka, M. Krapf-Güntherb, K. Kaiblingerb, F. Pipelkab,B. Bilenberg
Proc. SPIE Optics + Photonics 2010

Microfabricated magnetic bead polydimethylsiloxane microarrays
Jenny Aveyarda, Tobias Hedegaard, Brian Bilenberg and Dan V. Nicolaua,
Microelectronic Engineering 2010

Formation of nanopatterned polymer blends in photovoltaic devices
Ximin He, Feng Gao, Guoli Tu,David Hasko, Sven Huttner, Ullrich Steiner, Neil C. Greenham, Richard H. Friend, and Wilhelm T. S. Huck,
Nano Letters, 2010

Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications
R. Hainberger, R. Brucka, N. Kataeva, R. Heer, A. Köck, P. Czepl, K. Kaiblinger, F. Pipelka and B. Bilenberg, Microelectronic Engineering, 2009

Industrial applications demanding low and high resolution features realized by soft UV-NIL and hot embossing
R. Miller, T. Glinsner, G. Kreindl, P. Lindner, M. Wimplinger, SPIE Advanced Lithography Proceedings (7271) 2009

Design and fabrication using nanoimprint lithography of a nanofluidic device for DNA stretching applications
E. Abad, S. Merino, A. Retolaza, A. Juarros, Microelectronic Engineering 85 (2008) 818—821.

ICP etch processes for nanoimprint lithography
C.C.Welch, B. Bilenberg, Proceedings PESM 2007

High-quality patterns produced by nanoimprint lithography and inductive coupled plasma etching
B. Bilenberg, C. C. Welch, Proceedings MNE 2007
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