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NILT Standard Stamps are stamps with fixed patterns defined by NILT. These stamps are ideal for testing and process optimization.
The Grating Standard Stamp is a low-cost standard stamp with periodic line and pillars grating patterns. The Grating Standard Stamp can be shipped within two business days and customers can choose among different variants with different specifications.
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Low-cost line and pillar gratings in silicon
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Different options for periods, line/pillar widths, and depth
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Suitable for testing and R&D within many areas
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Periods down to 180 nm
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Shipment within 2 days
In-stock stamps - Ready for shipment
| Stamp No. |
Grating type |
Stamp Size |
Active area |
Period |
Width |
LER |
Depth |
| GS4-1 |
Line array |
2 cm x 2 cm |
1.7 cm x 1.7 cm |
200 nm |
90 nm |
10 nm |
100 nm |
| GS4-2 |
Line array |
2 cm x 2 cm |
1.7 cm x 1.7 cm |
250 nm |
145 nm |
5 nm |
100 nm |
| GS4-3 |
Line array |
2 cm x 2 cm |
1.7 cm x 1.7 cm |
300 nm |
170 nm |
10 nm |
100 nm |
| GS4-4 |
Line array |
2 cm x 2 cm |
1.7 cm x 1.7 cm |
350 nm |
215 nm |
10 nm |
100 nm |
| GS5-2 |
Square pillar array |
2 cm x 2 cm |
1.7 cm x 1.7 cm |
400 nm |
205 nm |
10 nm |
275 nm |
Anti-sticking layer (ASL) is optional
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Image - Grating Standard Stamp
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| Click to enlarge |
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