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The Multiple microlens arrays standard stamp is optimal for testing and process development within hot embossing of microlenses. The stamp contains 3 different patterns (lines, pillars and lense shaped holes) at 3 different pitches (1 µm, 2 µm and 4 µm). The stamp is offered in Silicon and the size of the stamp is 20 mm x 20 mm. The lines and pillars have a little rounded corners caused by the etching used to achieve the lens shaped holes.
Specifications
| Stamp size |
20 mm x 20 mm |
| Stamp material |
Silicon |
| Stamp thickness |
1 mm |
| Structure pitch |
1 µm - 4 µm |
| Etch depth |
Structure dependent (see layout for details) |
| Pattern field size |
5 mm x 5 mm |
| Delivery time |
3-4 weeks |
Anti-sticking layer (ASL) and dicing are optional
Examples
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Multiple Microlens Array Standard Stamp
Examples of patterns and features
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Related information
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