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References
Well-defined microapertures for ion channel biosensors
E. Halža, T. H. Bro, B. Bilenberg, and A. Koçer
Analytical Chemestry. 2013, 85, 811−815
DWDM laser arrays fabricated using thermal nanoimprint lithography on indium phosphide substrates
K. Smistrup, O. Hansen, F. Khan, M. Emanuel, Y. Ma, Y. Zhang, A. Kristensen, S. Rishton
The 57th annual conference on electron, ion, and photon beam technology and nanofacrication, EIPBN 2013
Simulation and experimental study of the effects of process factors on the uniformity of the residual layer thickness in hot embossing
F. Omar, A. Kolew, E. B. Brousseau, H. Hirshy
Journal of Micro- and Nano-Manufacturing, 2013 by ASME, Vol. 1 / 021002-1
Modeling the constitutive and frictional behavior of PTFE flexible stamps for NIL
M.R. Sonne, J.H. Hattel
Microelectronic Engineering 106 (2013) 1–8
Replication of large area nanoimprint stamp with small critical dimension loss
M. FanTao, G. Le, W. ZhiWen, H. ZhiTao, C. JinKui
Science China - Technological Sciences March 2012 Vol.55 No.3: 600–605
Microfluidic chip designs process optimization and dimensional quality control
M. Calaon, H. N. Hansen, G. Tosello, J. Garnaes, J. Nørregaard, W. Li
Journal Of Microsystem Technology - Heidelberg, December 3-5, 2012
Printing colour at the optical diffraction limit
K. Kumar, H. Duan, R. Hegde, S. Koh, J. Wei, and J. Yang
Nature Nanotechnology (2012). doi:10.1038/nnano.2012.128
Production quality control of microfluidic designs
M. Calaon, H. N. Hansen, G. Tosello1, J. Garnaes, J. Nørregaard, M. Guttmann
Microfluidics 2012 - Heidelberg
A nanoporous silicon nitride membrane using a two-step lift-off pattern transfer with thermal nanoimprint lithography
Bhargav P Nabar, Zeynep Celik-Butler, Brian H Dennis and Richard E Billol
2012 J. Micromech. Microeng. 22 045012
Optical properties of gold and aluminium nanoparticles for silicon solar cell applications
T. L. Templea and D. M. Bagnall
Journal of Applied Physics 109, 084343, 2011
Profiles of complex periodic structures determined by scatterometry
P-E. Hansen, B. Bilenberg, Y. R. Shen and M. Karamehmedovic.
Proceedings of the 13th International Confeence on Metrology and Properties of Engineering Surfaces, Twickenham Stadium, UK, April 2011
Vertical sidewall roughness measured by AFM and SEM
Jørgen Garnæs, Brian Bilenberg, Radu Malureanu, Jacob Markussen
Proceedings Nanoscale 2010
Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding
R. Brucka, R. Hainbergera, R. Heera, N. Kataevaa, A. Köcka, M. Krapf-Güntherb, K. Kaiblingerb, F. Pipelkab,B. Bilenberg
Proc. SPIE Optics + Photonics 2010
Microfabricated magnetic bead polydimethylsiloxane microarrays
Jenny Aveyarda, Tobias Hedegaard, Brian Bilenberg and Dan V. Nicolaua,
Microelectronic Engineering 2010
Formation of nanopatterned polymer blends in photovoltaic devices
Ximin He, Feng Gao, Guoli Tu,David Hasko, Sven Huttner, Ullrich Steiner, Neil C. Greenham, Richard H. Friend, and Wilhelm T. S. Huck,
Nano Letters, 2010
Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications
R. Hainberger, R. Brucka, N. Kataeva, R. Heer, A. Köck, P. Czepl, K. Kaiblinger, F. Pipelka and B. Bilenberg, Microelectronic Engineering, 2009
Industrial applications demanding low and high resolution features realized by soft UV-NIL and hot embossing
R. Miller, T. Glinsner, G. Kreindl, P. Lindner, M. Wimplinger, SPIE Advanced Lithography Proceedings (7271) 2009
Design and fabrication using nanoimprint lithography of a nanofluidic device for DNA stretching applications
E. Abad, S. Merino, A. Retolaza, A. Juarros, Microelectronic Engineering 85 (2008) 818–821.
ICP etch processes for nanoimprint lithography
C.C.Welch, B. Bilenberg, Proceedings PESM 2007
High-quality patterns produced by nanoimprint lithography and inductive coupled plasma etching
B. Bilenberg, C. C. Welch, Proceedings MNE 2007
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