References

 

Well-defined microapertures for ion channel biosensors

E. Halža, T. H. Bro, B. Bilenberg, and A. Koçer
Analytical Chemestry. 2013, 85, 811−815




DWDM laser arrays fabricated using thermal nanoimprint lithography on indium phosphide substrates

K. Smistrup, O. Hansen, F. Khan, M. Emanuel, Y. Ma, Y. Zhang, A. Kristensen, S. Rishton
The 57th annual conference on electron, ion, and photon beam technology and nanofacrication, EIPBN 2013




Simulation and experimental study of the effects of process factors on the uniformity of the residual layer thickness in hot embossing

F. Omar, A. Kolew, E. B. Brousseau, H. Hirshy
Journal of Micro- and Nano-Manufacturing, 2013 by ASME, Vol. 1 / 021002-1




Modeling the constitutive and frictional behavior of PTFE flexible stamps for NIL

M.R. Sonne, J.H. Hattel
Microelectronic Engineering 106 (2013) 1–8




Replication of large area nanoimprint stamp with small critical dimension loss

M. FanTao, G. Le, W. ZhiWen, H. ZhiTao, C. JinKui
Science China - Technological Sciences March 2012 Vol.55 No.3: 600–605




Microfluidic chip designs process optimization and dimensional quality control

M. Calaon, H. N. Hansen, G. Tosello, J. Garnaes, J. Nørregaard, W. Li
Journal Of Microsystem Technology - Heidelberg, December 3-5, 2012




Printing colour at the optical diffraction limit

K. Kumar, H. Duan, R. Hegde, S. Koh, J. Wei, and J. Yang
Nature Nanotechnology (2012). doi:10.1038/nnano.2012.128




Production quality control of microfluidic designs

M. Calaon, H. N. Hansen, G. Tosello1, J. Garnaes, J. Nørregaard, M. Guttmann
Microfluidics 2012 - Heidelberg




A nanoporous silicon nitride membrane using a two-step lift-off pattern transfer with thermal nanoimprint lithography

Bhargav P Nabar, Zeynep Celik-Butler, Brian H Dennis and Richard E Billol
2012 J. Micromech. Microeng. 22 045012




Optical properties of gold and aluminium nanoparticles for silicon solar cell applications

T. L. Templea and D. M. Bagnall
Journal of Applied Physics 109, 084343, 2011




Profiles of complex periodic structures determined by scatterometry

P-E. Hansen, B. Bilenberg, Y. R. Shen and M. Karamehmedovic.
Proceedings of the 13th International Confeence on Metrology and Properties of Engineering Surfaces, Twickenham Stadium, UK, April 2011




Vertical sidewall roughness measured by AFM and SEM

Jørgen Garnæs, Brian Bilenberg, Radu Malureanu, Jacob Markussen
Proceedings Nanoscale 2010




Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

R. Brucka, R. Hainbergera, R. Heera, N. Kataevaa, A. Köcka, M. Krapf-Güntherb, K. Kaiblingerb, F. Pipelkab,B. Bilenberg
Proc. SPIE Optics + Photonics 2010




Microfabricated magnetic bead polydimethylsiloxane microarrays

Jenny Aveyarda, Tobias Hedegaard, Brian Bilenberg and Dan V. Nicolaua,
Microelectronic Engineering 2010




Formation of nanopatterned polymer blends in photovoltaic devices

Ximin He, Feng Gao, Guoli Tu,David Hasko, Sven Huttner, Ullrich Steiner, Neil C. Greenham, Richard H. Friend, and Wilhelm T. S. Huck,
Nano Letters, 2010




Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

R. Hainberger, R. Brucka, N. Kataeva, R. Heer, A. Köck, P. Czepl, K. Kaiblinger, F. Pipelka and B. Bilenberg, Microelectronic Engineering, 2009




Industrial applications demanding low and high resolution features realized by soft UV-NIL and hot embossing

R. Miller, T. Glinsner, G. Kreindl, P. Lindner, M. Wimplinger, SPIE Advanced Lithography Proceedings (7271) 2009




Design and fabrication using nanoimprint lithography of a nanofluidic device for DNA stretching applications

E. Abad, S. Merino, A. Retolaza, A. Juarros, Microelectronic Engineering 85 (2008) 818–821.




ICP etch processes for nanoimprint lithography

C.C.Welch, B. Bilenberg, Proceedings PESM 2007




High-quality patterns produced by nanoimprint lithography and inductive coupled plasma etching

B. Bilenberg, C. C. Welch, Proceedings MNE 2007

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