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65-stamps are made in fused silica / quartz from 6025 mask blanks. The size is 65 mm x 65 mm x 6.35 mm and the patterned area is in the center on a 15 µm high mesa. The stamps can be made with any design specified by customers and are patterned using electron beam lithography. The area around the mesa can either be transparent or non-transparent, e.g. covered with chromium.
NILT delivers 65-stamps for different applications such as: SAW devices, meta materials and optical resonators.
Specifications:
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Stamp material |
Fused silica (Quartz) |
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Stamp size |
65 mm x 65 mm |
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Stamp thickness |
6.35 mm (0.25 inch) |
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Mesa size |
Up to 25 mm x 25 mm |
| Mesa height |
15 µm (other heights are possible upon request) |
| Minimum lateral dimension |
20 nm |
| Aspect ratio |
Up to 1:5 (pattern dependent) |
| Design |
Customer specified |
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Design file format |
gds, dxf, tdb |
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Anti-sticking |
FDTS (optional) |
| Delivery time |
8-10 weeks |
Examples
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65-stamps
Different examples of patterns and features
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Related information
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