Pillars

The Large Area Pillar Standard Stamp is a high-quality standard stamp in Silicon with large patterned areas containing photonic crystal structures. It has 4 areas, each 1 cm x 1 cm, with square arrays of pillars.

 

Stamp size	2 inch round wafer
Stamp material	Silicon
Stamp thickness	525 µm +/- 25 µm
Structure size	125 nm, 175 nm, 225 nm, 275 nm (rounded squares)
Structure pitch	200 nm, 300 nm, 400 nm, 500 nm
Protrusion height	100 nm - 300 nm (you decide!)
Tolerance, lateral and vertical dimensions	+/- 15%
Defect density	Less than 0.1% of total patterned area

 

Anti-sticking layer (ASL) and dicing are optional

 

 

Examples

Large Area Pillar Standard Stamp Different examples of patterns and features

 

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Large Area Pillar Standard Stamp (PDF) Request Information / Prices