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The Wire Grid Polarizer (WGP) Standard Stamp is ideal for testing the fabrication of wire grid polarizers by nanoimprint lithography. The WGP stamp features a large active area of
12 mm x 12 mm with 50 nm lines and spaces - the 50 nm lines appear as grooves on the stamp. The standard stamp is suitable for both thermal and UV NIL by the use of an intermediate polymer stamp copy of the standard stamp.
- Cost-effective stamp for testing of both NIL and wire grid polarizers
- 50 nm wide grooves with 50 nm spacing
- Fast delivery time, typically 3 weeks
Specifications
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Type A |
Type B |
| Stamp size |
2 inch round wafer with flat |
2 inch round wafer with flat |
| Stamp material |
Silicon |
Silicon |
| Active area |
12 mm x 12 mm |
6 mm x 6 mm |
| Stamp thickness |
500 µm +/- 25 µm |
500 µm +/- 25 µm |
| Structure size |
50 nm wide grooves with 50 nm spacing |
50 nm wide grooves with 50 nm spacing |
| Lateral tolerances |
+/- 10 nm |
+/- 10 nm |
| Structure depth |
100 nm |
100 nm |
| Vertical tolerances |
+/- 15 nm |
+/- 15 nm |
| Defect density |
Less than 0.01% of patterned area |
Less than 0.01% of patterned area |
Anti-sticking layer (ASL) and dicing are optional.
Examples
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WGP Standard Stamp
Different examples of patterns and features
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Related information
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