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NILT offers a wide range of processing services, often in combination with NILT core competences, electron beam lithography and nanoimprint lithography, but also independently. All standard silicon processes are offered:
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UV photolithography (365 nm UV contact aligner)
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Material deposition (sputtering, thermal, electron beam, LPCVD, PECVD, spin coating)
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Etching (RIE, ICP, wet)
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Thermal oxidation
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Characterization (SEM, AFM, profilometer, ellipsometer, reflectometer, optical microscopes)
If you have any needs for processing services please contact us
Examples
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Processing
Different examples of patterns and features |
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Related information
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