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NILT offers anti-sticking coating by FDTS on any suitable substrate not larger than 8 inch round. The coating is performed by vapor phase deposition and the substrate is treated with standard processes as oxygen plasma prior to the FDTS deposition. The oxygen plasma treatment can be circumvented if required.
General specifications
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Maximum substrate size |
8 inch round |
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Substrate materials |
Silicon, Fused Silica, Nickel (adhesion layer of 3-4 nm Al2O3 is used on Ni), polymers |
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Contact angle with water |
Larger than 105 deg |
| FDTS chemical name |
1H,1H,2H,2H-perflourodecyltrichlorosilane |
| FDTS Chemical formula |
Cl3Si(CH2)2(CF2)7CF3 |
| FDTS CAS no. |
78560-44-8 |
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Related information
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