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NILT® Quartz 65
NILT Custom Stamps are stamps engineered according to customer specifications and design. These stamps are suitable for application developments and prototyping.
The NILT® Quartz 65 stamps are custom-designed stamps in quartz made from 6025 mask blanks (photomask blanks). The final 65 stamps are 65 mm x 65 mm x 6.35 mm with a mesa in the center that is up to 25 mm x 25 mm with a height of 15 µm. The area around the mesa can either be transparent or non-transparent, e.g. covered with chromium.
The NILT Custom Stamps fit into all commercially available NIL tools requiring this specific form factor and they are patterned by state-of-art electron beam lithography with structures down to 20 nm (pattern dependent).
NILT ® Quartz 65 stamps are engineered for the specific purpose. NILT assists the customer in all necessary aspects related to the design of the NILT Custom Stamps.
Specifications:
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Stamp material |
Quartz (Fused Silica) |
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Stamp size |
65 mm x 65 mm |
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Stamp thickness |
6.35 mm |
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Design |
Customer specified |
| Pattern size |
From 20 nm |
| Aspect ratio |
From 1:1 to 1:4 (pattern dependent) |
| Mesa size |
Up to 25 mm x 25 mm, typically 10 mm x 10 mm |
| Mesa height |
15 µm |
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Mesa surrounding |
Transparrent or non-transparrent (chromium coated) |
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Anti-sticking layer (ASL) |
Optional |
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