NILT Custom Stamps are stamps engineered according to customer specifications and design. These stamps are suitable for application developments and prototyping.
The NILT
® Quartz stamps are custom-designed stamps in quartz for wafer scale imprinting or step-and-repeat imprinting, typically in a UV imprint set-up. The stamps fit into all commercially available NIL tools and they are patterned by state-of-art electron beam lithography with structures down to 20 nm (pattern dependent).
The NILT
® Quartz stamps are engineered for the specific purpose. NILT assists the customer in all necessary aspects related to the design of NILT Custom Stamps.
Specifications:
|
Stamp material |
Quartz (Fused Silica) |
|
Stamp size |
2", 3", 4" and 6" round wafer format and any rectangular shape within these boundaries |
|
Stamp thickness |
Typically 500 µm, maximum 2 mm |
| Pattern size |
From 20 nm |
| Aspect ratio |
From 1:1 to 1:5 (pattern dependent) |
|
Design |
Customer specified |
|
Anti-sticking layer (ASL) |
Optional |
|
