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NILT® Silicon
NILT Custom Stamps are stamps engineered according to customer specifications and design. These stamps are suitable for application developments and prototyping.
The NILT® Silicon stamps are custom engineered stamps in silicon for wafer scale imprinting or step-and-repeat imprinting, typically in a thermal imprint set-up. The NILT Custom Stamps fit into all commercially available NIL tools and they are patterned by state-of-art electron beam lithography with structures down to 20 nm (pattern dependent).
NILT® Silicon stamps are engineered for the specific purpose. NILT assists the customer in all necessary aspects related to the design of NILT Custom Stamps.
Specifications:
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Stamp material |
Silicon |
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Stamp size |
2", 3", 4" and 6" round wafer format and any rectangular shape within these boundaries |
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Stamp thickness |
Typically 500 µm, maximum 2 mm |
| Pattern size |
From 20 nm |
| Aspect ratio |
From 1:2 - 1:10 (pattern dependent) |
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Design |
Customer specified |
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Anti-sticking layer (ASL) |
Optional |
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Example: Custom stamp in Silicon
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| Click to enlarge |
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