|
NILT Standard Stamps are stamps with fixed patterns defined by NILT. These stamps are ideal for testing and process optimization.
The Large Area Pillar Standard Stamp is a high-quality standard stamp in Silicon with large patterned area of photonic crystal and anti-reflective structures. It has 4 areas, each 1 cm x 1 cm, with square arrays of pillars.
-
Cost-effective and high quality standard stamp
-
Large patterned area with pillars of 4 different dimensions
-
Photonic crystal structures and anti-reflective structures
-
Structure sizes between 125 nm and 275 nm
-
Fast delivery time of typically 3 weeks
Specifications
| Stamp size |
2 inch round wafer |
| Stamp material |
Silicon |
| Stamp thickness |
525 µm +/- 25 µm |
| Structure size |
125 nm, 175 nm, 225 nm, 275 nm (rounded squares) |
| Structure pitch |
200 nm, 300 nm, 400 nm, 500 nm |
| Protrusion height |
100 nm - 300 nm (you decide!) |
| Tolerance, lateral and vertical dimensions |
+/- 15% |
| Defect density |
Less than 0.1% of total patterned area |
Anti-sticking layer (ASL) and dicing are optional
|
Image - Large Area Pillar Standard Stamp in Silicon
 |
| Click to enlarge |
|
|
